Monolithically integrated optical displacement sensor based on triangulation and optical beam deflection
1999
A monolithically integrated optical displacement sensor based on
triangulation and optical beam deflection is reported. This sensor
is simple and consists of only a laser diode, a polyimide waveguide,
and a split detector (a pair of photodiodes) upon a GaAs
substrate. The resultant prototype device is extremely small (750 µm × 800 µm). Experiments have shown that
this sensor can measure the displacement of a mirror with resolution of
better than 4 nm. Additionally, we have experimentally demonstrated
both axial and lateral displacement measurements when we used a
cylindrical micromirror (diameter, 125 µm) as a movable
external object.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
7
References
26
Citations
NaN
KQI