RF-sputtered ITO and ITO:Zr studied by in situ spectroscopic ellipsometry

We report results from in situ real-time spectroscopic ellipsometry (RT-SE) investigations into the sputter deposition and subsequent annealing behavior of permittivity-engineered transparent conductive oxide (TCO) films. RT-SE reveals information about the growth dynamics and evolution of the films' electro-optical properties during deposition. We investigate the correlations of the ex situ optical and electrical measurements with structural analysis for select films.