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Microwave Plasma Etching of Silicon Dioxide for Half-Micron ULSIs
Microwave Plasma Etching of Silicon Dioxide for Half-Micron ULSIs
1989
Kazuo Nojiri
Eri Iguchi
Koichiro Kawamura
Kazuya Kadota
Keywords:
Nanotechnology
Micrometre
Etching
Analytical chemistry
Silicon dioxide
Materials science
Ion source
Correction
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