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Importance of crystallinity improvement in MoS2 film by compound sputtering even followed by post sulfurization
Importance of crystallinity improvement in MoS2 film by compound sputtering even followed by post sulfurization
2021
Shinya Imai
Takuya Hamada
Masaya Hamada
Takanori Shirokura
Iriya Muneta
Kuniyuki Kakushima
Tetsuya Tatsumi
Shigetaka Tomiya
Kazuo Tsutsui
Hitoshi Wakabayashi
Keywords:
Chemical engineering
Sputtering
Crystallinity
Materials science
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