Charging effects and ultraviolet irradiation for carbon films prepared by ion beam bombardment

Abstract Carbon films were prepared by evaporation of carbon during neon ion bombardment (IVD method) in the low-energy region and the films were exposed to charged particles induced by rf plasma and irradiated by ultraviolet rays simultaneously for enhancing the crystalline growth. Charging effects were studied by the measurement of surface potential, and the crystalline state for carbon films was evaluated by Raman scattering spectroscopy and SEM images. The spectra of the film prepared under optimum conditions indicated a clear peak which agreed with the diamond structure. The status of crystallization of carbon films depended on the rf power of discharge, and the growth of diamond crystals was enhanced by ultraviolet irradiation at the same time.