Micro-Optical Components for Information Technology Fabricated Via Liga Technique

We present the design and technical realization of exemplary micro-optical structures and devices for optical communication technology: A precision ferrule with (0.35 ± 0.2) dB coupling loss for 12-fold fibre ribbons, a 4 x 4 fibre-optical cross connect with non-moving mirrors, and a 4 x 4 multimode integrated-optical star coupler with less than 2dB uniformity have been fabricated by combination of the LIGA technique with precision engineering methods, e. g. electro discharge machining or diamond fly-cut milling. Further, “contactless embossing” for the in-place production of microlenses is introduced and discussed. The structures and devices presented are characterized by high precision, high performance, ease of assembly, and mass production capability via standard replication methods. All the main components have been made from thermoplastic materials via precision injection or compression moulding.