Old Web
English
Sign In
Acemap
>
Paper
>
Fundamental Evaluation of Gas-Phase Elementary Reaction Models for Silicon Carbide Chemical Vapor Deposition
Fundamental Evaluation of Gas-Phase Elementary Reaction Models for Silicon Carbide Chemical Vapor Deposition
2017
Yuichi Funato
Noboru Sato
Yasuyuki Fukushima
Hidetoshi Sugiura
Takeshi Momose
Yukihiro Shimogaki
Keywords:
Hybrid physical-chemical vapor deposition
Elementary reaction
Chemical vapor deposition
Silicon carbide
Combustion chemical vapor deposition
Electron beam physical vapor deposition
Inorganic chemistry
Chemistry
gas phase
Analytical chemistry
Correction
Source
Cite
Save
Machine Reading By IdeaReader
36
References
5
Citations
NaN
KQI
[]