Effects of squeeze film damping on a clamped-clamped beam MEMS filter

This paper presents a novel model for investigating squeeze film effect on a simple flexural beam resonator based on modal Galerkin reduced order method, step by step linearization and state space formulation. In contrast to conventional equivalent circuit model, this method enables the user to calculate scattering parameters of the filter as a two port network directly from geometry, consequently has the capability for considering any physical phenomena (in this case squeeze film effect) without losing generality. In this study a clamped-clamped beam has been considered as the resonating structure of the filter and the problem has been solved for dynamic motion of the beam simultaneously with gas pressure, voltages, and electrical current of input and output port of the filter. The results were verified with previous experimental and theoretical studies and an acceptable agreement achieved.