Old Web
English
Sign In
Acemap
>
Paper
>
Wafer-Scale Ion Beam Lithography of Nanopore Devices
Wafer-Scale Ion Beam Lithography of Nanopore Devices
2013
J Klingfus
Achim Nadzeyka
S. Bauerdick
Tim Albrecht
Joshua B. Edel
Keywords:
X-ray lithography
Analytical chemistry
Ion beam
Stencil lithography
Nanopore
Wafer
Materials science
Next-generation lithography
Ion beam lithography
Optoelectronics
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
2
Citations
NaN
KQI
[]