Optical properties of -Bi 2 O 3 thin films grown by reactive sputtering

thin films were grown on Si and quartz substrates underdifferent oxygen flow ratios OFR by radio frequency reactive magnetron sputtering. TheTauc-Lorentz dispersion method was adopted to model the optical dispersion functions of the thinfilms. The optical bandgap was obtained by three different methods. It was found that refractiveindex and extinction coefficient decrease, and the optical bandgap has a slight blue shift withincreasing the OFR. Factors influencing the optical constants and optical bandgap are discussed.©