Old Web
English
Sign In
Acemap
>
Paper
>
Study of Cu Diffusion Barrier using Mn-doped Co film
Study of Cu Diffusion Barrier using Mn-doped Co film
2020
Taro Matsudaira
Tomohiro Shimizu
Takeshi Ito
Shoso Shingubara
Keywords:
Barrier layer
Sputtering
mn doped
Chemical engineering
Materials science
Diffusion barrier
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]