A miniature electron ionization source fabricated using microelectromechanical systems (MEMS) with integrated carbon nanotube (CNT) field emission cathodes and low-temperature co-fired ceramics (LTCC)

Abstract The use of microelectromechanical systems (MEMS) components in miniature mass spectrometers is particularly attractive due to their small size and scalable manufacturing capability. Our group has pioneered the development of miniature electron ionization sources combining MEMS fabricated structures with integrated carbon nanotube (CNT) cold-cathode field emitters. However, until now they have been of limited use due to the limited ability to direct the ions into a mass analyzer. In this work, we design a miniature ion source using a microfabricated MEMS device and a low temperature co-fired ceramic (LTCC) carrier that includes electrical connections, ion optics for directing ions out of the device, and a sample inlet. We present the design and fabrication of the ion source; simulate the energy and angular dispersion; and experimentally determine the energy and angular dispersion.