Time Dependent Variability in Advanced FinFET Technology for End-of-Lifetime Reliability Prediction

Time dependent variability has become a significant concern for End-of-lifetime(EOL) reliability prediction for advanced technology with continuous scaling. In this work, we explore time dependent variability of BTI and HCI on our advanced FinFET technology to demonstrate that Defect-Centric model is a good candidate to describe both of them and there is no obvious difference between 8nm and 7nm for BTI and HCI variation η parameter. Thus, a framework is proposed for BTI and HCI EOL degradation prediction with given ppm criteria.