Silicon micro-pore X-ray optics

We present our development of novel light-weight and low-cost micro-pore X-ray optics based on the Micro Electro Mechanical Systems (MEMS) technologies. We successfully fabricated X-ray mirror chips with surface roughness less than several nm and an accurately defined optic mount. Our studies suggest this type of optics is a promising device for X-ray optics in many research fields such as space research, nuclear physics, and microanalysis.