Study of the X-ray microbeam for scanning microscopes

Abstract We fabricated a Schwarzschild X-ray objective which has the maximum X-ray transmittance of 9% at the wavelength of 14.1nm and evaluated an X-ray microbeam formed by the objective. We measured the knife-edge response of the microbeam and performed a fitting calculation of the response, using the point-spread function for the objective. It was found that the beam diameter of the microbeam was 45nm. In this paper, details of these experiments and the application of the microbeam will be discussed.