Old Web
English
Sign In
Acemap
>
Paper
>
Characterizing recycled fumed silica slurries in ILD CMP applications
Characterizing recycled fumed silica slurries in ILD CMP applications
2005
Ara Philipossian
Farhang Shadman
Patrick Lévy
Saied Tousi
Barry Gotlinsk
W. Scott Rader
Paul Lefevre
Isamu Koshiyama
Keywords:
Parallel computing
Computer science
Composite material
Fumed silica
Slurry
Chemical engineering
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]