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Thermal Reactive Ion Etching of Minor Metals with SF6 Plasma
Thermal Reactive Ion Etching of Minor Metals with SF6 Plasma
2017
Han Gang
Murata Yuki
Minami Yuto
Sohgawa Masayuki
Abe Takashi
Keywords:
Analytical chemistry
Thermal
Plasma processing
Sputtering
Materials science
Minor metals
Reactive-ion etching
Plasma
Environmental chemistry
Inorganic chemistry
Chemical engineering
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