Effects of sputtering pressure on properties of copper oxide thin films prepared by rf magnetron sputtering

Abstract Copper oxide thin films produced by rf magnetron sputtering on glass substrates have been characterised by XRD, SEM, AFM, spectrophotometer and four-point probe measurements. It is shown that process parameters can be varied to produce films of varying compositions, and optical and electrical properties. Depositions at 200 W power and an oxygen flowrate of 2 sccm in particular are found to favour the formation of single phase cuprous oxide. The optical and electrical properties of the films prepared under the stated conditions are of potential interest for application in semiconducting materials.