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Characterization of MgZnO films depending on the deposition power of RF sputtering system
Characterization of MgZnO films depending on the deposition power of RF sputtering system
2019
조연정
최준영
김진용
김현아
박강현
이기성
김창득
Keywords:
Optoelectronics
Sputtering
Deposition (law)
Materials science
Correction
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