Magnetic properties and fine structure of FePt–(C4F8)n granular thin films

Abstract FePt–(C 4 F 8 ) n granular films have been prepared by facing targets sputtering method with plasma polymerizing reaction. The FePt alloy was deposited on fused quartz substrate as same as the (C 4 F 8 ) n matrix was polymerized. Then, they were annealed at 600°C in reduced air. Their magnetic properties and fine structures were investigated. The films prepared at C 4 F 8 partial pressures of 0.10 and 0.20 mTorr, which consisted of fine FePt particles with a size of 5–10 nm, had high coercivities of 4–8 kOe caused by the stress between FePt particles and fluorocarbon matrix.