Precision Optical Coatings on Large Substrates by Reactive Magnetron Sputtering

Peter Frach,Daniel Glöß,Hagen Bartzsch,Thomas Goschurny,Andy Drescher,Christian Gottfried,Jörn-Steffen Liebig,Johannes Hartung,Andreas Heisig,Harald Grune,Lothar Leischnig,Steffen Leischnig,Carsten Bundesmann,Horst Neumann

Precision Optical Coatings on Large Substrates by Reactive Magnetron Sputtering

2016

Peter Frach
Daniel Glöß
Hagen Bartzsch
Thomas Goschurny
Andy Drescher
Christian Gottfried
Jörn-Steffen Liebig
Johannes Hartung
Andreas Heisig
Harald Grune
Lothar Leischnig
Steffen Leischnig
Carsten Bundesmann
Horst Neumann

The upscaling of highly productive technologies for precison optics and appropriate equipment will be presented. The application for e.g. gradient coatings or special coatings for holographic 3D-displays will be shown.

Keywords:

Holography
Sputter deposition
Optoelectronics
Refractive index
Optical coating
Optics
Materials science
Coating
Sputtering
reactive magnetron

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