Old Web
English
Sign In
Acemap
>
Paper
>
Thin film structure of aluminium nitride films prepared by reactive magnetron sputtering
Thin film structure of aluminium nitride films prepared by reactive magnetron sputtering
2006
최대한
장호성
최비공
김유성
이진희
천희곤
이재영
유용주
김대일
Keywords:
Sputter deposition
Thin film
Aluminium nitride
Ceramic materials
Materials science
Composite material
Sputtering
reactive magnetron
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]