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Effect of Crystal Plane Orientation on Protrusion Formation during Sputter-Etching of SUS410 Stainless Steel
Effect of Crystal Plane Orientation on Protrusion Formation during Sputter-Etching of SUS410 Stainless Steel
2017
Nakasa Keijiro
Wang Rongguang
Yamamoto Akihiro
Zhang Qinglian
Sumomogi Tsunetaka
Keywords:
Chemical substance
Metallurgy
Composite material
Etching
Materials science
Sputtering
crystal plane
Correction
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