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Materials processing by focused ion beams for TEM sample preparation and nanostructuring
Materials processing by focused ion beams for TEM sample preparation and nanostructuring
2003
L. Frey
C. Lehrer
Keywords:
Sputtering
Nanostructure
Beam (structure)
Ion
Integrated circuit
Transmission electron microscopy
Sample preparation
Analytical chemistry
Materials science
Nanotechnology
materials processing
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