A Micromachined Permalloy Magnetic Actuator Array for Micro Robotics Assembly Systems

Arrays of permalloy magnetic actuators have been studied for the use as precision micro robotics assembly systems. The actuator arrays have been tested for lifting and moving silicon and glass chips. The actuator unit consists of a permalloy plate 1 mm x 1 mm X 5/spl mu/m in size together with polysilicon bending supports. Experimentally, it can lift a 87 /spl mu/N (or 8.88 mg) force under a magnetic field of approximately 2 x 10/sup 4/ A/m. A proposed synchronous driving mode has been observed, and both translation and rotation of a silicon chip has been demonstrated.