Integrated micro-laser displacement sensor

A new integrated optical microlaser displacement sensor including a Michelson interferometer was developed and its feasibility as a measurement device was confirmed. It can measure the relative distance traveled against an outside reflective mirror. The measurement resolution is expected to be on the order of 0.01 /spl mu/m. Its dimensions are 2.0 mm by 1.6 mm. Therefore, the displacement sensor itself can be moved at high speed and can be incorporated into a micromachine because its inertia is extremely small.