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Trench Gate Process for 60-nm-Node C-Axis Aligned Crystalline In-Ga-Zn-O Field-Effect Transistors
Trench Gate Process for 60-nm-Node C-Axis Aligned Crystalline In-Ga-Zn-O Field-Effect Transistors
2015
Yoshinobu Asami
A. Shimomura
Yutaka Okazaki
Daisuke Matsubayashi
Masashi Tsubuku
Motomu Kurata
Satoru Okamoto
S. Sasagwa
Tomoaki Moriwaka
Tetsuya Kakehata
Yuto Yakubo
Kiyoshi Kato
Y Yamamoto
Shunpei Yamazaki
Keywords:
Nuclear magnetic resonance
Field-effect transistor
Crystal
Trench
Materials science
trench gate
Optoelectronics
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