Ion-Etched Gratings For Laser Applications

Ion beam sputter etching has proven to be a superior technique for producing grating sampling mirrors for large optical systems. The patterns to be etched are defined by a photoresist masking film on the mirror surface. Grating patterns have been produced on laser mirrors by replication of diamond-scribed master patterns, while holographic construction has been used to produce linear and nonlinear gratings. The microscopic details of ion etched grating profiles show that the process is capable of high resolution pattern delineation and large area device fabrication.© (1981) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.