Fabrication of micro-slot optics on curved substrate by X-ray lithography and electroplating

We have developed micro-slot optics (MSO) which can be used in the mirrors to reflect and focus X-rays. It is composed of a large number of concentric rings of curved MSO plates with necessary radial supporting structures to form a spherical shape. Flat MSO plates can be fabricated by X-ray lithography and normal electroplating; however, the subsequent plastically deforming process is very difficult to achieve, since the tiny curvature of the metal MSO is within its elastically deforming range. In this work, a method is developed to fabricate spherically curved MSO plates. After the X-ray lithography process, spherical MSO plates can be obtained directly by electroplating on a curved substrate. X-ray testing results show an obvious focal spot, with an angular resolution of about 5 arcmin, demonstrating that the micro-slots in the MSO plates have been curved successfully.