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Formation of High-Mobility IGZO Thin Films with Plasma Enhanced Reactive Processes
Formation of High-Mobility IGZO Thin Films with Plasma Enhanced Reactive Processes
2018
Yuichi Setsuhara
Masashi Endo
Kosuke Takenaka
Giichiro Uchida
Akinori Ebe
Keywords:
Sputtering
Thin film
Plasma
Materials science
Inorganic chemistry
oxide semiconductor
Optoelectronics
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