Enhanced tunability performance of low temperature crystallized Pb0.4Sr0.6TiO3 thin films derived from distinct microstructure

Abstract This investigation presents a novel method to prepare Pb 0.4 Sr 0.6 TiO 3 thin films crystallized at relatively low temperature with different microstructures and enhanced tunability performance on LaNiO 3 buffered SiO 2 /Si substrates. The incorporation of oxygen during the ex-situ RF magnetron sputtering unusually changes the microstructure of the films and remarkably improves the tunability because of the modulated dielectric constant with and without electric field. The dielectric response versus the DC electric field analysis revealed that the tunablity increased from 61.6% to 73.4% at ±400 kV/cm with increasing content of oxygen while the loss factor retained relatively low, suggesting the film could be one of the promising candidates for the microwave tunable devices compatible with Si integrated circuits.