Influence of V-shaped groove profile distortion on the response of a heterodyne microscope

ABSTRACT An algorithm is considered to calculate responses of a scanning differential heterodyne microscope to microgrooves of arbitrary profile. It is important for a characterization of triangular waveguides for surface plasmon polaritons with a heterodyne microscope. The algorithm was used for a calculation of phase and amplitude responses to triangular grooves with slight deviation from ideal profile. It was shown that small deviations substantially impact on microscope response. The influence of profile distortions on responses was investigated for two kinds of a deviation from triangular profile. The algorithm of simultaneous determination of two profile parameters from experimental phase and amplitude responses is presented. Keywords: heterodyne microscopy, diffraction, inte rferometry, object char acterization, metrology 1. INTRODUCTION The problem of profile determination for V-shaped microgrooves etched in the metal substrate is associated with the possibility of their use as waveguides for surface plasmon polaritons