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High resolution electron beam lithography on x ray mask substrates. Effects of electron scattering and membrane heating
High resolution electron beam lithography on x ray mask substrates. Effects of electron scattering and membrane heating
1991
Klaus Reimer
Keywords:
Scanning electron microscope
X-ray lithography
Cathode ray
Materials science
Electron-beam lithography
Stencil lithography
Electron scattering
Electron beam-induced deposition
Optics
Reflection high-energy electron diffraction
Correction
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