Old Web
English
Sign In
Acemap
>
Paper
>
APPLICATIONS OF UV-LIGA AND GRAYSCALE LITHOGRAPHY FOR DISPLAY TECHNOLOGIES
APPLICATIONS OF UV-LIGA AND GRAYSCALE LITHOGRAPHY FOR DISPLAY TECHNOLOGIES
2019
I. V. Timoshkov
A. V. Khanko
V. I. Kurmashev
D. V. Grapov
A. A. Kastevich
G.A. Govor
A. K. Vetcher
Keywords:
LIGA
Optoelectronics
Materials science
grayscale lithography
Correction
Source
Cite
Save
Machine Reading By IdeaReader
7
References
1
Citations
NaN
KQI
[]