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Memetic Algorithms Parametric Optimization for Microlithography
Memetic Algorithms Parametric Optimization for Microlithography
2007
C. Dür
Tim Fühner
Bernd Tollkuhn
Andreas Erdmann
Gabriella Kókai
Keywords:
Parametric statistics
Mathematical optimization
Genetic algorithm
Sequential quadratic programming
Local search (optimization)
Memetic algorithm
Computer science
parametric optimization
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