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Precise Extraction of Metal Gate Work Function from Bevel Structures
Precise Extraction of Metal Gate Work Function from Bevel Structures
2006
Atsushi Kuriyama
O. Faynot
L. Brevard
Amélie Tozzo
Laurence Clerc
J. Mitard
V. Vidal
Simon Deleonibus
S. Cristoloveanu
Hiroshi Iwai
Keywords:
Metal gate
Electronic engineering
Bevel
Work function
Materials science
Optoelectronics
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