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URCAT (U-shaped-Recess-Channel-Array Transistor) Technology for 60nm DRAM and beyond
URCAT (U-shaped-Recess-Channel-Array Transistor) Technology for 60nm DRAM and beyond
2007
Chihoon Lee
Jong Dae Park
Soon-yeon Park
Seung-Moo Lee
Sun-Cheol Hong
In-Kyoung Kim
Yun Jung Choi
Taewoo Lee
G. Y. Jin
Kinam Kim
Keywords:
Nanotechnology
Transistor
Electronic engineering
Materials science
Dram
Communication channel
Optoelectronics
Physics
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