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Towards Si-Cap-Free SiGe Passivation: Impact of Surface Preparation on Low-Pressure Oxidation of SiGe
Towards Si-Cap-Free SiGe Passivation: Impact of Surface Preparation on Low-Pressure Oxidation of SiGe
2021
Kurt Wostyn
Hiroaki Arimura
Yosuke Kimura
Andriy Hikavyy
Dirk Rondas
Thierry Conard
L. A. Ragnarsson
Naoto Horiguchi
Keywords:
Passivation
Chemical engineering
Pressure oxidation
Materials science
surface preparation
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