Design and Prototyping of Hybrid Interference Filters

Anna Sytchkova,Maria Luisa Grilli,Guohang Hu,Y. Chai,Daniele De Felicis,Hongbo He,Edoardo Bemporad,Angela Piegari,Jianda Shao

Design and Prototyping of Hybrid Interference Filters

2019

Anna Sytchkova
Maria Luisa Grilli
Guohang Hu
Y. Chai
Daniele De Felicis
Hongbo He
Edoardo Bemporad
Angela Piegari
Jianda Shao

Nano-structured surfaces for hybrid interference optical filters were designed by finite-element method and their prototypes were fabricated using r.f. sputtering, focused ion beam lithography and direct laser writing.

Keywords:

Interference (wave propagation)
Lithography
Optoelectronics
Optical filter
Refractive index
Sputtering
Focused ion beam
Laser
Materials science
Negative index metamaterials
focused ion beam lithography
nanostructure fabrication

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