Preparation of 80 and 110K-Phase Bi-Sr-Ca-Cu-O Thin Films by RF Magnetron Sputtering Using He+O 2 Gas

In-situ optical emission spectroscopy measurements were performed in order to clarify the effect of He gas addition on the superconductivity of the Bi-Sr-Ca-Cu-0 thin films which were prepared by RF magnetron sputtering method using He+O2 and Ar+O2 as sputtering gas. From the results, we found that active particles of ionized oxygen atom, ionized oxygen molecular and radical CuO were efficiently produced by He gas addition.