Atomic-layer deposited thulium oxide as a passivation layer on germanium

I. Z. Mitrovic,S. Hall,M. Althobaiti,David Hesp,V.R. Dhanak,A. Santoni,Ayendra Weerakkody,Naser Sedghi,Paul R. Chalker,Christoph Henkel,E. Dentoni Litta,Per-Erik Hellström,Mikael Östling,H. Tan,Sylvie Schamm-Chardon

Atomic-layer deposited thulium oxide as a passivation layer on germanium

2015

I. Z. Mitrovic
S. Hall
M. Althobaiti
David Hesp
V.R. Dhanak
A. Santoni
Ayendra Weerakkody
Naser Sedghi
Paul R. Chalker
Christoph Henkel
E. Dentoni Litta
Per-Erik Hellström
Mikael Östling
H. Tan
Sylvie Schamm-Chardon

A comprehensive study of atomic-layer deposited thulium oxide (Tm2O3) on germanium has been conducted using x-ray photoelectron spectroscopy (XPS), vacuum ultra-violet variable angle spectroscopic ...

Keywords:

Passivation
Deposition (law)
Ellipsometry
Germanium
Electron diffraction
Transmission electron microscopy
Physics
X-ray photoelectron spectroscopy
Band gap
Analytical chemistry

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