Design and fabrication of a high precision x-ray deformable mirror

AOA-Xinetics has been developing techniques for shaping grazing incidence optics with surface-normal and surface-parallel electrostrictive Lead magnesium niobate (PMN) actuators bonded to mirror substrates for several years. These actuators are highly reliable; exhibit little to no hysteresis, aging or creep; and can be closely spaced to correct low and mid-spatial frequency errors in a compact package. In this paper we discuss the design and fabrication of a 45cm grazing incidence mirror fitted with 45 PMN actuators and integral strain gauges and temperature sensors that allow sub-nanometer control of the surface figure.