Dynamic analysis of new micromachined valveless microinjector

A novel micro-machined valve-less micro-injector has been demonstrated in the present paper. The micro-injector is designed by thermally bubble driven actuation method that requires no mechanical moving parts for actuation and control of droplets. The use of thermal bubble for actuation provides virtual chamber neck and virtual valves as well. Furthermore it offers simplified fabrication in a single wafer that is compatible with IC fabrication processes.© (1999) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.