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Dramatic Downsizing of Soft X‐Ray Synchrotron Light Source from Compact to Tabletop
Dramatic Downsizing of Soft X‐Ray Synchrotron Light Source from Compact to Tabletop
2009
Hironari Yamada
Norio Toyosugi
Dorian Minkov
Yoshiko Okazaki
Keywords:
LIGA
Microfabrication
X-ray
Optics
Synchrotron light source
Synchrotron
Optoelectronics
Materials science
soft x ray
Correction
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