Flexible Ti-Ni-N Thin Films Prepared by Magnetron Sputtering

The article reports on flexible Ti-Ni-N films which exhibit an enhanced resistance to cracking in bending. The Ti-Ni-N films were prepared by reactive magnetron sputtering using a dual magnetron. Results of reported experiments demonstrate that: a low effective Young's modulus E * = E/(1-ν 2 ) resulting in a high ratio H/E * ≥ 0.1; a high elastic recovery We ≥ 60% and a compressive macrostress (σ < 0) are necessary conditions which ensure that the Ti-Ni-N films exhibit an enhanced resistance against cracking in bending; here E is the Young's modulus and ν is the Poison's ratio. The Ti-Ni-N films with these properties belong to a new class of advanced coatings called flexible coatings. These coatings are simultaneously hard, tough and resistant to cracking.