Old Web
English
Sign In
Acemap
>
Paper
>
First-Principles Study and Sputtering Deposition of Ternary Zinc Nitride YZn 3 N 3
First-Principles Study and Sputtering Deposition of Ternary Zinc Nitride YZn 3 N 3
2021
Ryosuke Kikuchi
Nakamura Toru
Takahiro Kurabuchi
Yasushi Kaneko
Yu Kumagai
Fumiyasu Oba
Keywords:
Metallurgy
Sputtering
Nitride
Zinc nitride
Ternary operation
Sputter deposition
Materials science
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]