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Multi levels Air gap Integration using Sacrificial Material Approach for Advanced Cu Interconnects Technologies
Multi levels Air gap Integration using Sacrificial Material Approach for Advanced Cu Interconnects Technologies
2008
R. Gras
F. Gaillard
D. Bouchu
P-H. Haumesser
G. Imbert
Laurent Vandroux
A. Farcy
Thierry Chevolleau
G. Passemard
J. Torres
Pascal Ancey
Keywords:
Air gap (plumbing)
Engineering physics
Materials science
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