Fabrication and characterization of a new automotive air-to-fuel sensors based on Pt- and TiO2-doped Nb2O5 film deposited by IBED

Abstract This paper describes the preparation of TiO 2 -doped Nb 2 O 5 thin film using the ion-beam-enhanced deposition (IBED) technique, and development of a new automobile air/fuel (A/F) sensor with an additionally integrated platinum temperature sensor and a Pt heater. The resistive jump at the stoichiometric point in the characteristic curve is three orders of magnitude. The response time of the sensor is almost identical to that of the ZrO 2 oxygen sensor. The sensor performance stabilized after seven measurements. Preliminary results indicate that this sensor exhibits attractive performances and has the potential to monitor the λ value for exhaust gas of automobiles.