Magnetostrictive thin-film transducer elements for micro-electro-mechanical systems

In this paper we report the application of magnetostrictive thin-films to microelectromechanical sensors and actuators. The existing literature on this topic is briefly reviewed. Basic mechanical transducing elements such as beams, cantilevers and membranes are fabricated and coated with a soft amorphous, piezomagnetic alloy similar in composition to METGLAS® 2605-SC. A first micromachined, membrane-type pressure sensor based on inverse magnetostriction and magneto-optical detection is presented. Using Finite-Element Analysis (FEA) a new empirical equation for the magnetoelastic bending of a microcantilever was found. An approach to validate this formula experimentally is undertaken. The analytical and numerical modelling of simple micromechanical structures presents a first foundation for the design of magnetostrictive microsystems.