Fully CMOS-compatible TiN nanoantennas
2016
We report the first visible/NIR darkfield scattering spectroscopy measurements of single titanium nitride nanostructures. We grow these fully CMOS-compatible nanoantennas via low-temperature atomic layer deposition and characterize and correlate their optical and material properties.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
3
References
0
Citations
NaN
KQI